Resist Stripper N-530 series
A non-aqueous rubber-based negative resit stripper that minimizes damage to metals. It has excellent stripping performance and high resist solubility. The N-530 series also includes a dedicated rinse solution, allowing us to offer the optimal product to match your manufacturing process and specific requirements.
Product Overview
Rubber-based negative resists have been used as materials in photolithography processes due to their strong resistance to acids and alkalis and their strong adhesion to wafers.
With the wide spread of positive resists, the use of rubber-based negative resists has been declining, but there are still utilized in certain fields due to their characteristics. For many years, we have been providing stripping solutions suitable for processes that use these long-established rubber-based negative resists.
The N-530 series is a stripping solution specifically designed for rubber-based negative resists. It features high resist solubility while minimizing damage to various metals.
Additionally, it does not contain phenol or chlorine, making it an environmentally friendly option.
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