Other
- We will respond to your needs.ex) Small lot trial production to mass production, supply of consumables, polishing equipment, process, technology, etc.
- Specialized process technology development staff is available from development
- We have extensive evaluation equipment, so we can check and evaluate quality before and after processing.
- Mirror finishing of difficult-to-cut materials such as titanium and SiC is also available.
Processing target
Material | Processing target | Processing content | Corresponding size |
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・Various semiconductor substrates(Si, SiC, GaN, GaAs, sapphire, LiTaO3,(LiNbO3, SiN, AlN, SiN, various composite materials, etc.)
・Solar cell substrate ・Various metal substrates(Cu, Al, SUS, Ti, Au, Ag, W, etc.) ・Various glass substrates(Quartz, Pyrex glass, tempered glass,Soda glass, etc.) ・Various resin substrates |
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Φ2 inch to 300 mm |
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~Φ4inch ~□300mm |
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Diameter~150mm、 Length~450mm |
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Separate consultation |
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Separate consultation |
Processing example
SiN substrate | Sintered SiC substrate | ||
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Before processing | After processing | Before processing | After processing |
Ra=1156.7Å | Ra=4.0Å | Ra=1242.9Å | Ra=3.9Å |
Alumina substrate | AlN substrate | ||
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Before processing | After processing | Before processing | After processing |
Ra=7.7Å | Ra=3.2Å | Ra=128.5Å | Ra=18.6Å |
Single crystal SiC substrate | Cu film surface polishing | ||
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Before processing | After processing | Before processing | After processing |
Ra=41.4Å | Ra=2.4Å | Ra=106.9Å | Ra=16.7Å |
GaN substrate chamfering | Chamfering of glass substrate | ||
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Before processing | After processing | Before processing | After processing |
Crystal abnormal Si wafer chamfering | Chamfering of SiC wafer | ||
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Before processing | After processing | Before processing | After processing |